Argon Recovery Systems in the Semiconductor and Electronics Industry

In semiconductor and electronics manufacturing, high-purity argon is essential for maintaining stable, controlled environments. It is widely used in processes such as single-crystal silicon growth, chip fabrication, LED production, and display panel manufacturing, where it provides an inert atmosphere that prevents oxidation, contamination, and yield loss.

Kerong Gas offers advanced Argon Recovery Systems designed for the stringent requirements of semiconductor and electronics processes. Our system efficiently captures, purifies, and recycles using argon, returning it to production without compromising purity or process performance.

How It Works:
Step 1: Pre-treatment – removes dust, moisture, and impurities from exhaust gas.

Step 2: Adsorption Separation – multiple adsorption beds capture and separate argon-rich gas.

Step 3: Cryogenic Distillation – low-temperature distillation further purifies argon to high purity.

Step 4: Liquefaction & Vaporization – argon is recovered and returned as gas for reuse, while cold energy is recycled to improve system efficiency.

Key Advantages
1. Oil-Free Operation – contamination-free design maintains ultra-high purity required for semiconductor processes.

2. High Recovery Rate – recovers up to 90% of argon, significantly reducing the need for new purchases.

3. Fast Payback – reduced gas consumption allows most customers to recoup investment in 6–12 months.

4. High-Quality Recycled Gas Supply – stable, high-purity argon meets strict process specifications.

5. Real-Time Monitoring – multiple online analyzers continuously track gas composition, purity, and system performance.

6. Modular Skid Design – compact, plug-and-play system, easy to install, operate, and maintain.

By implementing Kerong Gas Argon Recovery Systems, semiconductor and electronics manufacturers can cut operating costs, reduce waste, and minimize environmental impact. Our solution transforms argon from a high-cost consumable into a recyclable, sustainable resource, aligning with the industry’s move toward green manufacturing and circular economy practices.

In addition to hydrogen recovery systems, Kelong Gas also provides nitrogen, argon, and helium recovery systems, helping clients across multiple industries optimize resource utilization and lower operating costs.